Fig. 1

Top (a) and front (b) views of the ultraviolet (UV)-C generator components. a, b Valve for connection to the laser gas system (1.1), pressure reducer valve (1.2), excimer gas cylinder valve (1.3), halogen filter (2), krypton fluoride (KrF) gas refill cylinder (3), energy meter display (6). a Vacuum pump (4), optical system (5), excimer laser CEX-100 (7), pressure gauge (8), mechanical frame (9)